MEMS wafers from Topsil offers the largest flexibility in terms of bulk properties and wafering. MEMS wafers based on Float Zone material has no oxygen in the bulk and have an excellent resistivity tolerance. Both of these are important control parameters for MEMS engineers.

MEMS wafers are available in diameters up to 150 mm in both Float Zone and Czochralski material. MEMS wafers are polished with state-of-the-art CMP polsihing tools and they have excellent mechanical properties.

Product Specifications: MEMS wafers