Nitrogen doped silicon


High-energy particle detectors are widely used to monitor radiation intensity in nuclear power plants, particle accelerators and in outer space. They are vulnerable for destruction due to harsh working environment and often need replacing. Topsil has great experience in manufacturing silicon wafers dedicated to particle detector fabrication.

Recently, to extend the range of dedicated products, Topsil has developed and introduced a new material: high resistivity, nitrogen-enriched FZ Si wafers. Extended features of the material include suppression of vacancy aggregates as well as excellent uniformity of radial resistivity distribution. These features are obtained by introducing into silicon a concentration of nitrogen atoms above 1E15 at/cm3

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